NEC has designed and built an Ångstrom level high resolution RBS Detector system for use with the NEC series of RBS/ERD/PIXE/NRA analyzers. This detector system has been fully tested and accepted at the customer's site.

The high resolution RBS Detector system is shown in the photograph to the left attached to the full wafer version of the model RC43 analysis end station. The detector consists of an entrance aperture to define the scattering angle, a single focusing 90° magnet to resolve the energy of each scattered ion, and a position sensitive micro channel plate detection system to count the ions as a function of position. The high resolution detector can easily be positioned at the 90° port or the 45° port of the RC43. The bellows allows angle variability of ± 5° at either port. The approximate energy resolution is about 1 keV as compared to about 15 keV for a standard solid state detector.

The detector system is designed for an incoming He+ beam of up to 500 keV. This is easily accomplished with high stability (20Vrms) using the 1 MV, 1.7 MV and 2 MV tandem Pelletron® accelerators.

The detector system is equipped with all necessary hardware and software for automated RBS data collection and analysis.