Raster Scanner System

NEC originally designed the NEC scan system was for NEC ion implanters, similar to our neutral beam trap deflector. It is also incorporated in ion beam analysis beamlines on Pelletron accelerator systems. The raster scanner assembly, when used with the related power supply and controller, provides a very reliable system for uniform ion beam deposition into flat targets.

Design

Raster Scanner Power Supply

We design the raster scanner power supply to position near the raster scanner assembly. It has a ratio of horizontal to vertical scanned frequencies, which are crystal locked, to optimize scan uniformity. Transformer coupling assures the complete absence of DC offset voltages.

Raster Scanner Controller

NEC equips the raster scanner controller with two potentiometers for separate control of the horizontal and vertical scanning plate voltages. Each set of plates can be turned off individually to allow set up of one scan direction at a time.

Electrostatic Neutral Beam Trap Deflector

NEC originally designed our electrostatic neutral beam trap deflector for NEC ion implanters. It is also incorporated in ion beam analysis beamlines on Pelletron accelerator systems. The purpose of the deflector is to prevent neutrals from reaching the target area.

Design


Related Documents
NEC Raster Scanner System
NEC Ion Beam Trap Deflector