Analysis Endstations

Ion Beam Analysis (IBA) Endstation

Ion Beam Analysis (IBA) Endstation

The NEC IBA endstation can perform qualitative materials analysis using multiple techniques simultaneously, including RBS, ERD, NRA, PIXE, and more.

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High Resolution Rutherford Backscattering  (HR RBS) Detector

High Resolution Rutherford Backscattering (HR RBS) Detector

This detector system can be added to an IBA endstation to significantly improve energy resolution and subsequently depth resolution for RBS analysis.

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Single Wafer Implant Endstation

Single Wafer Implant Endstation

The NEC implant endstation provides accurate dose monitoring with uniform deposition.

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