Ion Beam Analysis (IBA) Endstation
The NEC IBA endstation can perform qualitative materials analysis using multiple techniques simultaneously, including RBS, ERD, NRA, PIXE, and more.
High Resolution Rutherford Backscattering (HR RBS) Detector
This detector system can be added to an IBA endstation to significantly improve energy resolution and subsequently depth resolution for RBS analysis.
Single Wafer Implant Endstation
The NEC implant endstation provides accurate dose monitoring with uniform deposition.