Vacuum

Vacuum Valves

NEC vacuum valves are ultra-high vacuum compatible and allow rapid and reliable closure. Metering valves, right angle valves, and straight through valves are available.

Rotary Vacuum Feedthrough

NEC magnetic coupled rotary feedthroughs are ideal for applications requiring the transmission of high speed rotary motion into ultra-high vacuum environments. It is used to measure beam cross sectional shape.

Vibration Isolators

NEC vibration isolators significantly reduce vibration transmitted by turbo pumps or cryopumps to target chambers, microscopes, wafer processing chambers, end stations, or other vacuum apparatus that must be kept motionless.

Titanium Sublimators

Titanium sublimation pumping is ideal for fast pump down and high loads of chemically active gases. A variety of sublimator cartridge sizes and array designs are available.