Vacuum

NEC has a number of unique components for ultra-high vacuum systems. These include valves, titanium sublimator pumps, and vibration isolators for dampening turbo molecular pump vibration influence on a vacuum system.

Fast Acting Valve System

Fast Acting Valve System

There are three parts to the NEC fast acting valve system; the spring drive all-metal valve, coaxial pressure sensor and the trigger circuit.

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Aluminum Gaskets

Aluminum Gaskets

Here is a list of NEC aluminum gaskets with part number, description, and gasket diameter. Additional sizes are available upon request.

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Gas Metering Valves

Gas Metering Valves

Gas Metering Valves are ideal for applications requiring the control of gas flow into vacuums with corrosive gases or required ultra-clean conditions.

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Vibration Isolators

Vibration Isolators

NEC vibration isolators significantly reduce vibration transmitted by turbo pumps or cryopumps to target chambers, microscopes, wafer processing chambers, end stations, or other vacuum apparatus that must be kept motionless.

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Titanium Sublimators

Titanium Sublimators

Titanium sublimation pumping is ideal for fast pump down and high loads of chemically active gases. A variety of sublimator cartridge sizes and array designs are available.

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